HKUST Engineering Researchers Develop World’s First Deep-UV MicroLED Display Chips for Maskless Photolithography
In a breakthrough set to revolutionize the semiconductor industry, the School of Engineering of the Hong Kong University of Science and Technology (HKUST) has developed the world’s first-of-its-kind deep-ultraviolet (UVC) microLED display array for lithography machines. This enhanced efficiency UVC microLED has showcased the viability of a lowered cost maskless photolithography through the provision of adequate light output power density, enabling exposure of photoresist films in a shorter time.
HKUST Prof. Kei-May LAU Elected to the US National Academy of Engineering
The Hong Kong University of Science and Technology (HKUST) Prof. Kei-May LAU, Professor Emerita of the Department of Electronic and Computer Engineering and Research Professor of the Division of Emerging Interdisciplinary Areas, has been elected as a member of the US National Academy of Engineering (NAE), one of the highest professional distinctions accorded to an engineer, the organization points out.